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Resonators Resistor Microcapteurs Microfluidique Deep UV polymer Polycrystalline materials Organic electronics Low temperature electronics Strain gauge PECVD Silicium TFT In-situ doping Thin films Microelectronics Diazonium salts Organic field effect transistor Carbon nanotubes Polycrystalline silicon Mid-IR Photonic Copper Organic semiconductors Fatty acid Synthesis CMOS integrated circuits Low-frequency noise Low-cost silicon nanowires devices Flexible substrate Field effect transistors Nanofils de silicium Electrical performance Sphingomyelin lipids Organic field effect transistors Microresonators Deformation Low temperature Resistors Integrated photonics LPCVD Polymers Stabilité électrique Chemical sensor Silicon Electrodes Low temperatures Silicium microcristallin Electrical stability Microsensors Sensors Nanofils Basse température Photoluminescence Μ-Si doped Flexible electronics Plasma etching Amorphous materials Spacer method Polymer Reproducibilities Thin film transistors Nanowires Procédé SLS Functionalization Organic electronic devices Sphingomyelin Microcapteur Gas sensor Inkjet printing Infrared Nanoribbons Méthode des espaceurs Couches minces Chalcogenide TLM Chemical sensors Gel/fluid phase transition Photonics Chemical detection SLS process Sensor Doping Microfluidic PH Silicon nanowires Stretchable electronics Polysilicon Active layer Temperature ICP-CVD Micro-resonators Titanium nitride Micro-résonateurs Fonctionnalisation de surface Sensitivity Thin Film Transistors Density of states Photodetector Microcrystalline silicon CMOS compatible