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Gel/fluid phase transition Sensor Density of states Chalcogenide Nanofils de silicium Chemical detection Carbon nanotubes Active layer Integrated optics Polycrystalline materials Polycrystalline silicon Polymer Fatty acid Low temperatures Organic electronic devices Sphingomyelin lipids PECVD Amorphous materials Nanoribbons Reproducibilities Doping Field effect transistors Procédé SLS Temperature Bridged cyclo-oligophenylenes Low temperature electronics Silicon Electrical performance LPCVD Low temperature Microcapteur SLS process Thin film transistors Sensors Integrated photonics Photodetector Low-cost silicon nanowires devices Plasma etching CMOS integrated circuits Organic semiconductor Basse température Resistors Photoluminescence Flexible electronics Silicium microcristallin PH Microresonators Microcrystalline silicon Flexible substrate Electrodes Photonics Microfluidic Organic field effect transistors Nanowires Deep UV polymer Organic semiconductors Polysilicon Méthode des espaceurs ICP-CVD Sensitivity Functionalization Microsensors Couches minces Photonic Resonators Electrical stability Sphingomyelin Polymers Micro-resonators Stabilité électrique Deformation Chemical sensor Titanium nitride Spacer method Photonique intégrée Organic field effect transistor Micro-résonateurs Microcapteurs Low-frequency noise Microfluidique Mid-IR Copper Microelectronics Synthesis Silicium Organic electronics Gas sensor Μ-Si doped Nanofils Resistor Diazonium salts CMOS compatible Silicon nanowires Inkjet printing Thin films Infrared Thin Film Transistors Fonctionnalisation de surface Chemical sensors In-situ doping