Investigation on Suspended Gate Field Effect Transistor as Humidity Sensor

Olivier de Sagazan (1) , Bruno da Silva Rodrigues (2) , Samuel Crand (2) , France Le Bihan (2) , Tayeb Mohammed-Brahim (1)

1 IETR - Institut d'Électronique et des Technologies du numéRique
2 IETR - Institut d'Electronique et de Télécommunications de Rennes

Olivier de Sagazan, Bruno da Silva Rodrigues, Samuel Crand, France Le Bihan, Tayeb Mohammed-Brahim. Investigation on Suspended Gate Field Effect Transistor as Humidity Sensor. 24th Eurosensor Conference, Sep 2010, Linz, Austria. pp.1434-1437, ⟨10.1016/j.proeng.2010.09.385⟩. ⟨hal-00583972⟩