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Communication Dans Un Congrès Année : 2010

Humidity Sensor Thanks Array of Suspended Gate Field Effect Transistor

Résumé

This work deals with a sensor using array of Suspended Gate Field Effect Transistor (SGFET) to measure the relative humidity (%RH). Technics of microtechnology are used to fabricate a polysilicon bridge with a gap de 0,5 μm which acts as transistor gate. Electrical measures have been realized by sampling mode, involving a sensitivity of -5 μA/%. Also the SGFET humidity sensors are very interesting due to the simplicity to polarize and to analyze the output signal.
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Dates et versions

hal-00667803 , version 1 (08-02-2012)

Identifiants

  • HAL Id : hal-00667803 , version 1

Citer

Bruno da Silva Rodrigues, Olivier de Sagazan, Anne-Claire Salaün, Samuel Crand, France Le Bihan, et al.. Humidity Sensor Thanks Array of Suspended Gate Field Effect Transistor. 25th Symposium on Microelectronics Technology and Devices, SBMicro 2010, Sep 2010, Brazil. ⟨hal-00667803⟩
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