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Article Dans Une Revue Micro and Nano Letters Année : 2012

Bragg reflector formed on oxidized porous silicon

Résumé

The manufacturing of a porous silicon Bragg reflector on P+ silicon substrate is investigated and the effects of oxidation on the Bragg reflector parameters is studied, notably the shift of the central wavelength after oxidation. This Letter shows how to anticipate the changes due to oxi- dation rather than to endure them. First, the variations in the refractive index and thickness after oxidation were studied. Then, from these measurements, an oxidised porous silicon Bragg
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Dates et versions

hal-00711204 , version 1 (22-06-2012)

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Joël Charrier, Parastesh Pirasteh, Yann G. Boucher, Michel Gadonna. Bragg reflector formed on oxidized porous silicon. Micro and Nano Letters, 2012, 7, pp.105-108. ⟨10.1049/mnl.2011.0653⟩. ⟨hal-00711204⟩
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