Suspended Gate Field Effect Transistor with an Integrated Micro-Fluidic Channel Performed by Surface Micromachining for Liquids Sensing

Ismaïl Bouhadda (1) , Olivier de Sagazan (2) , France Le Bihan (2)

1 IETR - Institut d'Electronique et de Télécommunications de Rennes
2 IETR - Institut d'Électronique et des Technologies du numéRique

This paper presents original designs of micro-fluidic sensors. Targeted applications are pH-meters devices or chemical sensors. The sensing part of the device consists of a Suspended Gate Field Effect Transistor (SGFET). Chemicals to test are brought inside the device by a micro-fluidic channel. The floor of the channel consists on the drain, source and also active area of the transistor, whereas the top of the buried channel corresponding of the gate of the transistor. By this way products that flow in the micro-fluidic channel directly module the concentration charge inside the transistor's gap and thus induce changes in transfer characteristics. This paper describes the fabrication process and presents first electrical tests performed with liquid flow injection in the device showing the interest of the system.

Domaines: Micro et nanotechnologies/Microélectronique

Ismaïl Bouhadda, Olivier de Sagazan, France Le Bihan. Suspended Gate Field Effect Transistor with an Integrated Micro-Fluidic Channel Performed by Surface Micromachining for Liquids Sensing. Procedia Engineering, 2012, 26th European Conference on Solid-State Transducers (Eurosensors) Sep 2012 Krakow, 47, pp.754-757. ⟨10.1016/j.proeng.2012.09.257⟩. ⟨hal-00803343⟩