Beneficial effect of very thin active layer on the performance of microcrystalline silicon TFT

Mamadou Lamine Samb (1) , Emmanuel Jacques (1) , Khalid Kandoussi (1) , Khaled Belarbi (1) , Nathalie . Coulon (1) , Tayeb Mohammed-Brahim (1)

1 IETR - Institut d'Électronique et des Technologies du numéRique

Mamadou Lamine Samb, Emmanuel Jacques, Khalid Kandoussi, Khaled Belarbi, Nathalie . Coulon, et al.. Beneficial effect of very thin active layer on the performance of microcrystalline silicon TFT. ECS Transactions, 2012, 49 (1), pp.59-67. ⟨hal-00804867⟩