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Functional dielectric oxide and oxynitride compounds in the perovskite La-Ti-O-N system: from thin film sputtering deposition to dielectric characterization

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Conference papers
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https://hal-univ-rennes1.archives-ouvertes.fr/hal-00869754
Contributor : Ratiba Benzerga <>
Submitted on : Friday, October 4, 2013 - 9:53:12 AM
Last modification on : Monday, October 5, 2020 - 9:50:12 AM

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  • HAL Id : hal-00869754, version 1

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Claire Le Paven-Thivet, Laurent Le Gendre, Ratiba Benzerga, Yu Lu, Hung Nguyen, et al.. Functional dielectric oxide and oxynitride compounds in the perovskite La-Ti-O-N system: from thin film sputtering deposition to dielectric characterization. International Symposium on Inorganic and Environmental Materials 2013 (ISIEM 2013), Oct 2013, Rennes, France. ⟨hal-00869754⟩

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