Functional dielectric oxide and oxynitride compounds in the perovskite La-Ti-O-N system: from thin film sputtering deposition to dielectric characterization - Archive ouverte HAL Access content directly
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Functional dielectric oxide and oxynitride compounds in the perovskite La-Ti-O-N system: from thin film sputtering deposition to dielectric characterization

Stéphane Rioual
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hal-00869754 , version 1 (04-10-2013)

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  • HAL Id : hal-00869754 , version 1

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Claire Le Paven-Thivet, Laurent Le Gendre, Ratiba Benzerga, Yu Lu, Hung Nguyen, et al.. Functional dielectric oxide and oxynitride compounds in the perovskite La-Ti-O-N system: from thin film sputtering deposition to dielectric characterization. International Symposium on Inorganic and Environmental Materials 2013 (ISIEM 2013), Oct 2013, Rennes, France. ⟨hal-00869754⟩
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