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Conference papers

Structural and dielectric characterization of perovskite oxide and oxynitride lanthanum titanium films deposited by reactive sputtering deposition

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Conference papers
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https://hal-univ-rennes1.archives-ouvertes.fr/hal-00869768
Contributor : Ratiba Benzerga <>
Submitted on : Friday, October 4, 2013 - 10:07:37 AM
Last modification on : Monday, October 5, 2020 - 9:50:14 AM

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  • HAL Id : hal-00869768, version 1

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Claire Le Paven-Thivet, Yu Lu, Hung Nguyen, Ratiba Benzerga, Laurent Le Gendre, et al.. Structural and dielectric characterization of perovskite oxide and oxynitride lanthanum titanium films deposited by reactive sputtering deposition. 19th International Vacuum Congress (IVC-19), Sep 2013, Paris, France. ⟨hal-00869768⟩

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