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Article Dans Une Revue Thin Solid Films Année : 2014

Study of ferroelectric/dielectric multilayers for tunable stub resonator applications at microwaves

Résumé

Tunable coplanar waveguide stub resonators deposited on various ferroelectric/dielectric heterostructures are studied in the 10-GHz band. A frequency tunability of up to ~ 45% is achieved under a moderate biasing field (Ebias < 100 kV/cm) when the resonator is printed on KTa0.5Nb0.5O3 (KTN) ferroelectric thin film alone: this comes from the large permittivity agility of the KTN material (εr(KTN) varies from ~ 700 to ~ 200). Nevertheless this also leads to significant insertion loss due to the dielectric loss of the ferroelectric material itself (tanδr(KTN) ≈ 0.15-0.30 at 10 GHz). In this paper, an original route has been considered to reduce the device loss while keeping up a high frequency tunability. It consists in associating the KTN film with a dielectric film to elaborate ferroelectric/dielectric multilayers. The Bi1.5Zn0.9Nb1.5O7−δ (BZN) oxide material is selected here for two main reasons, namely its low dielectric loss (tanδr(BZN) ≈ 0.005-0.0075) and its moderate relative permittivity (εr(BZN) ≈ 95-125) at 12.5 GHz. The relevance of this approach is studied numerically and experimentally. We compare numerically two different heterostructures for which the ferroelectric film is grown on the dielectric film (KTN/BZN), or vice versa (BZN/KTN). A stub resonator printed on the most relevant heterostructure has been fabricated, and experimental data are discussed and compared to the numerical results.
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Dates et versions

hal-00911792 , version 1 (27-05-2014)

Identifiants

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Yonathan Corredores, Arnaud Le Febvrier, Xavier Castel, Ronan Sauleau, Ratiba Benzerga, et al.. Study of ferroelectric/dielectric multilayers for tunable stub resonator applications at microwaves. Thin Solid Films, 2014, 553, pp.109-113. ⟨10.1016/j.tsf.2013.11.068⟩. ⟨hal-00911792⟩
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