Micro-resonators based on integrated polymer technology for optical sensing
Résumé
Research on sensors has experienced a noticeable development over the last decades especially in label free optical biosensors. However, compact sensors without markers for rapid, reliable and inexpensive detection of various substances induces a significant research of new technological solutions. The context of this work is the development of a sensor based on easily integrated and inexpensive micro-resonator (MR) component in integrated optics, highly sensitive and selective mainly in the areas of health and food. In this work, we take advantage of our previous studies on filters based on micro-resonators (MR) to experiment a new couple of polymers in the objective to use MR as a sensing function. MRs have been fabricated by processing SU8 polymer as core and PMATRIFE polymer as cladding layer of the waveguide. The refractive index contrast reaches 0.16 @ 1550 nm. Sub-micronic ring waveguides gaps from 0.5 to 1 µm have been successfully achieved with UV (i-line) photolithography. This work confirms our forecasts, published earlier, about the resolution that can be achieved. First results show a good extinction coefficient of ~17 dB, a quality factor around 104 and a finesse of 12. These results are in concordance with the theoretical study and they allow us to validate our technology with this couple of polymers. Work is going on with others lower cladding materials that will be used to further increase refractive index contrast for sensing applications.
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