A novel deep-UV polymer for integrated photonics: waveguides structures towards cascade of multiple micro-resonators

Bruno Bêche (1) , Rigoberto Castro-Beltran (1) , David Pluchon (1) , Daphné Duval (2) , Marion Specht (1) , Nolwenn Huby (1) , Hervé Lhermite (3)

1 IPR - Institut de Physique de Rennes
2 CIN2 (CSIC-ICN), CIBER-BBN - Nanobiosensors and Bioanalytical Applications Group
3 IETR - Institut d'Électronique et des Technologies du numéRique

An overview of targeted current research on integrated photonics based on the new deep-UV210 organic material is given. We report on the interest in this new material and properties coupled to deep-ultraviolet (DUV) lithography processes towards the realization and optical characterization of sundry photonics structures. Such structures include sub-wavelength waveguides, pedestal and tapers waveguides until serial of optical micro-resonators (MRs) shaped as disk, ring, stadium and racetrack.

Mots clés: whispering gallery modes; polymers; micro-resonators; Integrated photonics

Domaines: Optique / photonique; Matériaux; Electromagnétisme

Bruno Bêche, Rigoberto Castro-Beltran, David Pluchon, Daphné Duval, Marion Specht, et al.. A novel deep-UV polymer for integrated photonics: waveguides structures towards cascade of multiple micro-resonators. European Optical Society EOS Conference TOM 1 - Guided-Wave Optics, Sep 2014, Berlin, Germany. pp.1-2. ⟨hal-01025711v2⟩