X. H. Zheng, J. P. Tu, and R. G. Song, Microstructure and tribological behavior of pulsed laser deposited a-CNx films, Applied Surface Science, vol.256, issue.10, p.3211, 2010.
DOI : 10.1016/j.apsusc.2009.12.007

M. Rusop, T. Soga, and T. Jimbo, The effect of processing parameters on amorphous carbon nitride layer properties, Diamond and Related Materials, vol.13, issue.11-12, p.2187, 2004.
DOI : 10.1016/j.diamond.2004.06.024

F. Falk, J. Meinschien, K. Schuster, and H. Stafast, Properties and preparation conditions of carbon nitride thin films deposited by laser CVD, Carbon, vol.36, issue.5-6, p.765, 1998.
DOI : 10.1016/S0008-6223(98)00003-7

C. B. Cao, H. Wang, and H. S. Zhu, Carbon nitride films deposited from organic solutions by electrodeposition, Diamond and Related Materials, vol.9, issue.9-10, p.1786, 2000.
DOI : 10.1016/S0925-9635(00)00324-1

H. Habuchi, H. Koketsu, and T. Katsuno, Optical properties of amorphous carbon nitride films with high nitrogen content, Diamond and Related Materials, vol.16, issue.4-7, p.1340, 2007.
DOI : 10.1016/j.diamond.2007.01.028

B. Bouchet-fabre, G. Lazar, D. Ballutaud, C. Godet, and K. Zellama, Influence on the sp3/sp2 character of the carbon on the insertion of nitrogen in RFMS carbon nitride films, Diamond and Related Materials, vol.17, issue.4-5, p.700, 2008.
DOI : 10.1016/j.diamond.2007.12.031

URL : https://hal.archives-ouvertes.fr/hal-00290145

S. Lopez, H. M. Dunlop, M. Benmalek, G. Tourillon, M. S. Wong et al., XPS, XANES and ToF-SIMS Characterization of Reactively Magnetron-sputtered Carbon Nitride Films, Surface and Interface Analysis, vol.25, issue.5, p.315, 1997.
DOI : 10.1002/(SICI)1096-9918(199705)25:5<315::AID-SIA238>3.0.CO;2-S

A. C. Ferrari, S. E. Rodil, and J. Roberrtson, Interpretation of infrared and Raman spectra of amorphous carbon nitrides, Physical Review B, vol.67, issue.15, p.155306, 2003.
DOI : 10.1103/PhysRevB.67.155306

Z. P. Wang, H. Ito, K. Masugata, and I. T. , Role of Nitrogen in the Formation of <formula formulatype="inline"><tex Notation="TeX">$\hbox{CN}_{x}$ </tex></formula> Films by Pulsed Laser Deposition, IEEE Transactions on Plasma Science, vol.40, issue.7, p.1815, 2012.
DOI : 10.1109/TPS.2012.2197224

A. Alkhawwam, B. Abdallah, K. Kayed, and K. Alshoufi, Effect of Nitrogen Plasma Afterglow on Amorphous Carbon Nitride Thin Films Deposited by Laser Ablation, Acta Physica Polonica A, vol.120, issue.3, p.545, 2011.
DOI : 10.12693/APhysPolA.120.545

A. C. Ferrari and J. Robertson, Interpretation of Raman spectra of disordered and amorphous carbon, Physical Review B, vol.61, issue.20, p.14095, 2000.
DOI : 10.1103/PhysRevB.61.14095

G. Beshkov, G. P. Vassilev, M. R. Elizalde, and T. Gomez-acebo, Hardness of C, CNx and AlN thin films after rapid thermal annealing, Materials Chemistry and Physics, vol.82, issue.2, p.452, 2003.
DOI : 10.1016/S0254-0584(03)00280-3