Ammonia sensors based on suspended silicon nanowires

Laurent Pichon (1) , Anne-Claire Salaün (1) , G Wenga (1) , R Rogel (1) , E Jacques (1)

1 IETR - Institut d'Electronique et de Télécommunications de Rennes

Resistors based on parallel suspended polycrystalline silicon nanowires are fabricated using the classical top down CMOS silicon technologies. Results show potential use as sensitive units of silicon nanowires for charged chemical species (ammonia) detection. Resistors are promising as low-cost manufacturing gas sensors, for very high sensitive ammonia detection over a large concentration range.

Mots clés: suspended silicon nanowires; CMOS compatible; ammonia sensor; sensitivity

Domaines: Micro et nanotechnologies/Microélectronique

Laurent Pichon, Anne-Claire Salaün, G Wenga, R Rogel, E Jacques (Dir.). Ammonia sensors based on suspended silicon nanowires. 87, pp.1003 - 1006, 2014, ⟨10.1016/j.proeng.2014.11.329⟩. ⟨hal-01113254⟩