Electronic sensor for pH measurements in nanoliters

Ismaïl Bouhadda (1) , Olivier de Sagazan (1) , France Le Bihan (1)

1 IETR - Institut d'Électronique et des Technologies du numéRique

An original design is proposed for the fabrication of an electronic sensor. The device consists on a field effect transistor (FET) combined with an integrated microfluidic channel and is devoted to charges detection in liquids. The technological process has been optimized. Fluidic inlet and outlet, performed by bulk micromachining, are located on the back side of the device. Electrical responses of the sensor are shown with different ambiances. Charge detection is validated thanks pH measurements. The sensors present high sensitivity associated to good electrical performances. Stability of the sensor is also presented and compared to nearby technologies

Mots clés: pH sensor; microfluidic; Field effect transistor.

Domaines: Micro et nanotechnologies/Microélectronique

Ismaïl Bouhadda, Olivier de Sagazan, France Le Bihan. Electronic sensor for pH measurements in nanoliters. Procedia Engineering, 2014, EUROSENSORS 2014, the 28th European Conference on Solid-State Transducers, 87, pp.915-918. ⟨10.1016/j.proeng.2014.11.304⟩. ⟨hal-01113824⟩