Skip to Main content Skip to Navigation
Journal articles

Microcrystalline silicon: Strain gauge and sensor arrays on flexible substrate for the measurement of high deformations

Abstract : This paper presents strain sensor arrays on flexible substrates able to measure local deformation induced by radii of curvature of few millimeters. Sensors use n-type doped microcrystalline silicon (μc-Si) as piezoresistive material, directly deposited on polyimide sheets at 165 °C. Sensitivity of individual sensors was investigated under tensile and compressive bending at various radii of curvature, down to 5 mm. A Transmission Line Method was used to extract the resistivity for each radius. The devices exhibited longitudinal gauge factors of −31 and longitudinal piezoresistive coefficients of −4.10−10 Pa−1. Reliability was demonstrated with almost unchanged resistances after cycles of bending (standard deviation of 1.7%). Strain gauge arrays, composed of 800 resistors on a 2 cm2 area, were fabricated with a spatial resolution of 500 × 500 μm2. Strain mapping showed the possibility to detect local deformation on a single resistor or to detect larger objects. These strain sensor arrays can find applications when high sensitivity and high spatial resolution is required. This paper also showed that μc-Si can be a relevant semi-conductor candidate for flexible electronics
Complete list of metadatas

Cited literature [29 references]  Display  Hide  Download

https://hal-univ-rennes1.archives-ouvertes.fr/hal-01240765
Contributor : Laurent Jonchère <>
Submitted on : Wednesday, January 27, 2016 - 12:40:21 PM
Last modification on : Wednesday, October 14, 2020 - 3:53:36 AM
Long-term archiving on: : Thursday, April 28, 2016 - 11:21:50 AM

File

Microcrystalline silicon.pdf
Files produced by the author(s)

Identifiers

Citation

Y. Kervran, O. de Sagazan, S. Crand, N. Coulon, T. Mohammed-Brahim, et al.. Microcrystalline silicon: Strain gauge and sensor arrays on flexible substrate for the measurement of high deformations. Sensors and Actuators A: Physical , Elsevier, 2015, 236, pp.273--280. ⟨10.1016/j.sna.2015.08.001⟩. ⟨hal-01240765⟩

Share

Metrics

Record views

485

Files downloads

460