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Journal articles
Microcrystalline silicon: Strain gauge and sensor arrays on flexible substrate for the measurement of high deformations
Abstract : This paper presents strain sensor arrays on flexible substrates able to measure local deformation induced by radii of curvature of few millimeters. Sensors use n-type doped microcrystalline silicon (μc-Si) as piezoresistive material, directly deposited on polyimide sheets at 165 °C. Sensitivity of individual sensors was investigated under tensile and compressive bending at various radii of curvature, down to 5 mm. A Transmission Line Method was used to extract the resistivity for each radius. The devices exhibited longitudinal gauge factors of −31 and longitudinal piezoresistive coefficients of −4.10−10 Pa−1. Reliability was demonstrated with almost unchanged resistances after cycles of bending (standard deviation of 1.7%). Strain gauge arrays, composed of 800 resistors on a 2 cm2 area, were fabricated with a spatial resolution of 500 × 500 μm2. Strain mapping showed the possibility to detect local deformation on a single resistor or to detect larger objects. These strain sensor arrays can find applications when high sensitivity and high spatial resolution is required. This paper also showed that μc-Si can be a relevant semi-conductor candidate for flexible electronics
Cited literature [29 references]
https://hal-univ-rennes1.archives-ouvertes.fr/hal-01240765
Contributor : Laurent Jonchère <>
Submitted on : Wednesday, January 27, 2016 - 12:40:21 PM
Last modification on : Wednesday, October 14, 2020 - 3:53:36 AM
Long-term archiving on: : Thursday, April 28, 2016 - 11:21:50 AM
Contributor : Laurent Jonchère <>
Submitted on : Wednesday, January 27, 2016 - 12:40:21 PM
Last modification on : Wednesday, October 14, 2020 - 3:53:36 AM
Long-term archiving on: : Thursday, April 28, 2016 - 11:21:50 AM
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