Deposition and dielectric characterization of strontium and tantalum-based oxide and oxynitride perovskite thin films

S. Jacq; C. Le Paven; L. Le Gendre; Ratiba Benzerga; François Cheviré; Franck Tessier; A. Sharaiha

doi:10.1016/j.solidstatesciences.2015.12.010

Journal articles

Deposition and dielectric characterization of strontium and tantalum-based oxide and oxynitride perovskite thin films

S. Jacq ¹ C. Le Paven ^{1, *} L. Le Gendre ¹ Ratiba Benzerga ¹ François Cheviré ² Franck Tessier ² A. Sharaiha ¹

* Corresponding author

1 IETR - Institut d'Électronique et des Technologies du numéRique

2 ISCR - Institut des Sciences Chimiques de Rennes

Keywords : dielectric epitaxy Oxynitride Perovskite reactive sputtering Thin films

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Journal articles

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Chemical Sciences

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