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Deposition and dielectric characterization of strontium and tantalum-based oxide and oxynitride perovskite thin films

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https://hal-univ-rennes1.archives-ouvertes.fr/hal-01254806
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Submitted on : Thursday, February 4, 2016 - 11:27:30 AM
Last modification on : Monday, October 5, 2020 - 9:50:23 AM
Long-term archiving on: : Saturday, November 12, 2016 - 8:58:19 AM

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S. Jacq, C. Le Paven, L. Le Gendre, Ratiba Benzerga, François Cheviré, et al.. Deposition and dielectric characterization of strontium and tantalum-based oxide and oxynitride perovskite thin films. Solid State Sciences, Elsevier, 2016, 54, pp.22-29. ⟨10.1016/j.solidstatesciences.2015.12.010⟩. ⟨hal-01254806⟩

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