Structural analysis of RF sputtered Ge-Sb-Se thin films by Raman and X-ray photoelectron spectroscopies

E. Baudet (1) , C. Cardinaud (2) , A. Girard (2) , E. Rinnert (3) , Karine Michel (4) , B. Bureau (1) , Virginie Nazabal (1)

1 ISCR - Institut des Sciences Chimiques de Rennes
2 IMN - Institut des Matériaux Jean Rouxel
3 IFREMER - Institut Français de Recherche pour l'Exploitation de la Mer
4 BRGM - Bureau de Recherches Géologiques et Minières (BRGM)

Keywords: Radio-frequency magnetron sputtering; Raman spectroscopy; Structure; Thin films; Chalcogenide glass; X-ray photoelectron spectroscopy

Domains: Chemical Sciences

E. Baudet, C. Cardinaud, A. Girard, E. Rinnert, Karine Michel, et al.. Structural analysis of RF sputtered Ge-Sb-Se thin films by Raman and X-ray photoelectron spectroscopies. Journal of Non-Crystalline Solids, 2016, 444, pp.64--72. ⟨10.1016/j.jnoncrysol.2016.04.017⟩. ⟨hal-01319062⟩