Structural analysis of RF sputtered Ge-Sb-Se thin films by Raman and X-ray photoelectron spectroscopies

E. Baudet; C. Cardinaud; A. Girard; E. Rinnert; Karine Michel; B. Bureau; Virginie Nazabal

doi:10.1016/j.jnoncrysol.2016.04.017

Journal articles

Structural analysis of RF sputtered Ge-Sb-Se thin films by Raman and X-ray photoelectron spectroscopies

E. Baudet ¹ C. Cardinaud ² A. Girard ² E. Rinnert ³ Karine Michel ⁴ B. Bureau ¹ Virginie Nazabal ¹

1 ISCR - Institut des Sciences Chimiques de Rennes

2 IMN - Institut des Matériaux Jean Rouxel

3 IFREMER - Institut Français de Recherche pour l'Exploitation de la Mer

4 BRGM - Bureau de Recherches Géologiques et Minières (BRGM)

Keywords : Radio-frequency magnetron sputtering X-ray photoelectron spectroscopy Chalcogenide glass Raman spectroscopy Structure Thin films

Document type :

Journal articles

Domain :

Chemical Sciences

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https://hal-univ-rennes1.archives-ouvertes.fr/hal-01319062
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Submitted on : Friday, May 20, 2016 - 11:57:25 AM
Last modification on : Friday, July 10, 2020 - 4:24:03 PM

Structural analysis of RF sputtered Ge-Sb-Se thin films by Raman and X-ray photoelectron spectroscopies

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Structural analysis of RF sputtered Ge-Sb-Se thin films by Raman and X-ray photoelectron spectroscopies

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