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Selenide sputtered films development for MIR environmental sensor

E. Baudet 1 Aldo Gutierrez 2 P. Nemec 3 Loïc Bodiou 2 Jonathan Lemaitre 2 O. de Sagazan 4 H. Lhermitte 4 E. Rinnert 5 Karine Michel 6 B. Bureau 1 Joël Charrier 2 Virginie Nazabal 1
1 ISCR - Institut des Sciences Chimiques de Rennes
2 FOTON - Fonctions Optiques pour les Technologies de l'informatiON
3 Department of Graphic Arts and Photophysics [University of Pardubice]
4 IETR - Institut d'Électronique et des Technologies du numéRique
5 IFREMER - Institut Français de Recherche pour l'Exploitation de la Mer
6 BRGM - Bureau de Recherches Géologiques et Minières (BRGM)
Keywords : Environmental detection Waveguides Thin films Surface roughness Spectroscopic ellipsometry Semiconducting selenium compounds Refractive index Reactive ion etching Microsensors Environmental sensor Hydrophobic polymers Ridge waveguides Single mode propagation Radio frequency magnetron sputtering Organic molecules Optical transducers Mid-infrared spectral range Magnetron sputtering Inductively coupled plasma Germanium Atomic force microscopy
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https://hal-univ-rennes1.archives-ouvertes.fr/hal-01367204
Contributor : Laurent Jonchère <>
Submitted on : Thursday, September 15, 2016 - 5:16:46 PM
Last modification on : Tuesday, January 12, 2021 - 4:42:09 PM

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UNIV-RENNES1 | ISCR | CNRS | INSTITUT-TELECOM | IETR | UNIV-NANTES | SCR_VC | UR1-UFR-SPM | INC-CNRS | FOTON | FOTON_SYSPHOT | UR1-UFR-ISTIC | IVER | BRGM | UNIV-RENNES | INSA-GROUPE | CENTRALESUPELEC | INSA-RENNES

Citation

E. Baudet, Aldo Gutierrez, P. Nemec, Loïc Bodiou, Jonathan Lemaitre, et al.. Selenide sputtered films development for MIR environmental sensor. Optical Materials Express, OSA pub, 2016, 6 (8), pp.2616--2627. ⟨10.1364/OME.6.002616⟩. ⟨hal-01367204⟩

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