Microfabricated test structures for thermal gas sensor

Matthieu Denoual; Mathieu Pouliquen; D. Robbes; O. de Sagazan; J. Grand; H. Awala; S. Mintova; S. Inoue; A. Mita-Tixier; Y. Mita

doi:10.1109/ICMTS.2016.7476165

Conference papers

Microfabricated test structures for thermal gas sensor

Matthieu Denoual ¹ Mathieu Pouliquen ² D. Robbes ¹ O. de Sagazan ³ J. Grand ⁴ H. Awala ⁴ S. Mintova ⁴ S. Inoue ⁵ A. Mita-Tixier ⁵ Y. Mita ⁵

1 Equipe Electronique - Laboratoire GREYC - UMR6072

GREYC - Groupe de Recherche en Informatique, Image et Instrumentation de Caen

2 Equipe Automatique - Laboratoire GREYC - UMR6072

GREYC - Groupe de Recherche en Informatique, Image et Instrumentation de Caen

3 IETR - Institut d'Électronique et des Technologies du numéRique

4 LCS - Laboratoire catalyse et spectrochimie

5 UTokyo - The University of Tokyo

Abstract : Microfabricated test structures are presented for the proof validation of a new chemical sensor concept. The proposed detection principle is based on time constant shift of a thermal device covered with zeolites when target species are adsorbed. © 2016 IEEE.

Keywords : Chemical sensors Microelectronics Zeolites Thermal gas Time constants Microfabrication Thermal devices Test structure Target species Microfabricated

Document type :

Conference papers

Domain :

Computer Science [cs] / Networking and Internet Architecture [cs.NI]

Engineering Sciences [physics] / Electronics

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https://hal-univ-rennes1.archives-ouvertes.fr/hal-01368109
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Submitted on : Monday, September 19, 2016 - 10:21:50 AM
Last modification on : Saturday, June 25, 2022 - 9:51:16 AM

Microfabricated test structures for thermal gas sensor

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Microfabricated test structures for thermal gas sensor

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