Microfabricated test structures for thermal gas sensor

Matthieu Denoual (1) , Mathieu Pouliquen (2) , D. Robbes (1) , O. de Sagazan (3) , J. Grand (4) , H. Awala (4) , S. Mintova (4) , S. Inoue (5) , A. Mita-Tixier (5) , Y. Mita (5)

1 Equipe Electronique - Laboratoire GREYC - UMR6072
2 Equipe Automatique - Laboratoire GREYC - UMR6072
3 IETR - Institut d'Électronique et des Technologies du numéRique
4 LCS - Laboratoire catalyse et spectrochimie
5 UTokyo - The University of Tokyo

Microfabricated test structures are presented for the proof validation of a new chemical sensor concept. The proposed detection principle is based on time constant shift of a thermal device covered with zeolites when target species are adsorbed. © 2016 IEEE.

Keywords: Chemical sensors; Microelectronics; Zeolites; Thermal gas; Time constants; Microfabrication; Thermal devices; Test structure; Target species; Microfabricated

Domains: Computer Science [cs]; Networking and Internet Architecture [cs.NI]; Engineering Sciences [physics]; Electronics

Matthieu Denoual, Mathieu Pouliquen, D. Robbes, O. de Sagazan, J. Grand, et al.. Microfabricated test structures for thermal gas sensor. 29th IEEE International Conference on Microelectronic Test Structures, ICMTS 2016, Mar 2016, Yokohama, Japan. pp.16--19, ⟨10.1109/ICMTS.2016.7476165⟩. ⟨hal-01368109⟩