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Microfabricated test structures for thermal gas sensor

Abstract : Microfabricated test structures are presented for the proof validation of a new chemical sensor concept. The proposed detection principle is based on time constant shift of a thermal device covered with zeolites when target species are adsorbed. © 2016 IEEE.
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Submitted on : Monday, September 19, 2016 - 10:21:50 AM
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Matthieu Denoual, Mathieu Pouliquen, D. Robbes, O. de Sagazan, J. Grand, et al.. Microfabricated test structures for thermal gas sensor. 29th IEEE International Conference on Microelectronic Test Structures, ICMTS 2016, Mar 2016, Yokohama, Japan. pp.16--19, ⟨10.1109/ICMTS.2016.7476165⟩. ⟨hal-01368109⟩



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