Patrick Verdonck, Ronaldo D. Mansano, Marcos Massi, Rodrigo S. Pessoa, Luis A. M. Barea, et al.. Investigations of Capacitively-Coupled Plasmas by Electrostatic Probe Technique.
30th Symposium on Microelectronics Technology and Devices (SBMicro 2015), Aug 2015, Salvador, Brazil.
⟨10.1109/SBMicro.2015.7298131⟩.
⟨hal-01380036⟩