Optical characterization at 7.7 μm of an integrated platform based on chalcogenide waveguides for sensing applications in the mid-infrared - Archive ouverte HAL Access content directly
Journal Articles Optics Express Year : 2016

Optical characterization at 7.7 μm of an integrated platform based on chalcogenide waveguides for sensing applications in the mid-infrared

Abstract

A selenide integrated platform working in the mid-infrared was designed, fabricated and optically characterized at 7.7 μm. Ge-Sb-Se multilayered structures were deposited by RF magnetron sputtering. Using i-line photolithography and fluorine-based reactive ion etching, ridge waveguides were processed as Y-junction, spiral and S-shape waveguides. Single-mode optical propagation at 7.7 μm was observed by optical near-field imaging and optical propagation losses of 2.5dB/cm are measured. Limits of detection of 14.2 ppm and 1.6 ppm for methane and nitrous oxide, respectively, could be potentially measured by using this platform as an evanescent field sensor. Hence, these technological, experimental and theoretical results represent a first step towards the development of an integrated optical sensor operating in the mid-infrared wavelength range. © 2016 Optical Society of America.

Dates and versions

hal-01398053 , version 1 (16-11-2016)

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Aldo Gutierrez, Emeline Baudet, Loïc Bodiou, Jonathan Lemaitre, Isabelle Hardy, et al.. Optical characterization at 7.7 μm of an integrated platform based on chalcogenide waveguides for sensing applications in the mid-infrared. Optics Express, 2016, 24 (20), pp.23109-23117. ⟨10.1364/OE.24.023109⟩. ⟨hal-01398053⟩
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