Nathalie Verbrugghe, Didier Fasquelle, Benoit Duponchel, Stéphanie Députier. Study of tungsten films deposited by DC sputtering dedicated to integrated heaters.
Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures, American Vacuum Society (AVS), 2017, 35 (3), pp.10.1116/1.4981786.
⟨10.1116/1.4981786⟩.
⟨hal-01542758⟩