Thermoelectric properties of co-sputtered CoSb3 thin films as a function of stoichiometry

Zhuang-Hao Zheng (1, 2) , Fu Li (1) , Feng Li (1) , Yin-Zhen Li (1, 3) , Ping Fan (1) , Jing-Ting Luo (1) , Guang-Xing Liang (2, 1) , Bo Fan (1) , Ai-Hua Zhong (1)

1 Shenzhen University [Shenzhen]
2 ISCR - Institut des Sciences Chimiques de Rennes
3 Shenzhen Key Laboratory of Sensor Technology

The skutterudite compound CoSb3 exhibits excellent thermoelectric properties for thermoelectric application. The composition plays an important role in affecting the microstructural and thermoelectric behavior of CoSb3, especially in the form of thin film. In this study, the Co-excess and Sb-excess CoSb3 thin films were prepared by radio frequency and direct magnetron co-sputtering technique. It was found that the thin film with excess Co exhibits a significant n-type conduction behavior and transforms to p-type conduction behavior with Sb rich. The X-ray diffraction patterns show that either the Co-excess or Sb-excess samples contain skutterudite CoSb3 and a secondary phase CoSb2. Additionally, Sb can be found in the Sb-excess samples, yet no Co can be observed in the Co-excess samples.

Mots clés: skutterudite CoSb3; thermoelectric property; micro-structure

Domaines: Matériaux; Science des matériaux [cond-mat.mtrl-sci]

Zhuang-Hao Zheng, Fu Li, Feng Li, Yin-Zhen Li, Ping Fan, et al.. Thermoelectric properties of co-sputtered CoSb3 thin films as a function of stoichiometry. Thin Solid Films, 2017, 632, pp.88-92. ⟨10.1016/j.tsf.2017.04.044⟩. ⟨hal-01542760⟩