Experimental design approach for deposition optimization of RF sputtered chalcogenide thin films devoted to environmental optical sensors

E. Baudet (1) , M. Sergent (2) , P. Němec (3) , C. Cardinaud (4) , E. Rinnert (5) , Karine Michel (6) , L. Jouany (1) , B. Bureau (1) , Virginie Nazabal (1)

1 ISCR - Institut des Sciences Chimiques de Rennes
2 LISA - Laboratoire d'Instrumentation et Sciences Analytiques
3 Department of Graphic Arts and Photophysics [University of Pardubice]
4 IMN - Institut des Matériaux Jean Rouxel
5 IFREMER - Institut Français de Recherche pour l'Exploitation de la Mer
6 BRGM - Bureau de Recherches Géologiques et Minières (BRGM)

Domains: Chemical Sciences; Material chemistry

E. Baudet, M. Sergent, P. Němec, C. Cardinaud, E. Rinnert, et al.. Experimental design approach for deposition optimization of RF sputtered chalcogenide thin films devoted to environmental optical sensors. Scientific Reports, 2017, 7 (1), pp.3500. ⟨10.1038/s41598-017-03678-w⟩. ⟨hal-01544248⟩