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Experimental design approach for deposition optimization of RF sputtered chalcogenide thin films devoted to environmental optical sensors

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Submitted on : Wednesday, June 27, 2018 - 3:22:10 PM
Last modification on : Monday, October 11, 2021 - 1:02:08 PM
Long-term archiving on: : Thursday, September 27, 2018 - 2:05:57 AM

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E. Baudet, M. Sergent, P. Němec, C. Cardinaud, E. Rinnert, et al.. Experimental design approach for deposition optimization of RF sputtered chalcogenide thin films devoted to environmental optical sensors. Scientific Reports, Nature Publishing Group, 2017, 7 (1), pp.3500. ⟨10.1038/s41598-017-03678-w⟩. ⟨hal-01544248⟩

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