Single-pulse femtosecond laser fabrication of concave microlens- and micromirror arrays in chalcohalide glass

Viktor Kadan (1) , Ivan Blonskyi (1) , Yevhen Shynkarenko (1) , Andriy Rybak (1) , Laurent Calvez (2) , Bohdan Mytsyk (1) , Oleh Spotyuk (3, 4)

1 NASU - National Academy of Sciences of Ukraine
2 ISCR - Institut des Sciences Chimiques de Rennes
3 Jan Dlugosz University in Czestochowa
4 Vlokh Institute of Physical Optics

The diffraction-limited piano-concave microlens- and micromirror arrays were produced in chalcohalide glass of 65GeS(2)-25Ga(2)S(3)-10CsCl composition transparent from similar to 0.5 to 11 mu m. Only a single 200 fs laser pulse with 800 nm central wavelength is required to form microlens, which after metal coating becomes a concave micromirror. This process can serve as a basis for flexible technology to fabricate regular microlens and micromirror arrays for optotelecom applications, its performance being limited only by repetition rate of the laser pulses (typically 1000 microlenses per second).

Mots clés: chalcohalide glass; femtosecond laser; microlens array; micromirror; laser ablation

Domaines: Chimie; Optique [physics.optics]

Viktor Kadan, Ivan Blonskyi, Yevhen Shynkarenko, Andriy Rybak, Laurent Calvez, et al.. Single-pulse femtosecond laser fabrication of concave microlens- and micromirror arrays in chalcohalide glass. Optics and Laser Technology, 2017, 96, pp.283--289. ⟨10.1016/j.optlastec.2017.05.025⟩. ⟨hal-01578542⟩