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Journal articles
Optimization in fabricating skutterudite CoSb3 thermoelectric thin films
Abstract : CoSb3 based thin films were prepared at room temperature by radio-frequency sputtering and the CoSb3 alloy targets were used with the Co:Sb atomic ratio of 1:3, 1:3.5 and 1:4, respectively. Then the as-deposited thin films were annealed at 300 and 325 °C under argon atmosphere for 1 h. It can be found that the thin films have single skutterudite phase structure when used the Co:Sb (1:3.5) alloy target. Though other films show the primary CoSb3 phase structure, there are some impurity phases can be observed from the X-ray diffraction patterns. For contrast, the thin films prepared by the Co:Sb (1:3.5) alloy target were annealed from 250 to 350 °C with the temperature interval of 25 °C. The results show that the thin film annealed at 325 °C has the best thermoelectric performance. © 2017, Springer Science+Business Media, LLC.
Keywords :
Annealing
Antimony
Cobalt
Film preparation
Phase structure
Skutterudites
Sputtering
Thermoelectricity
X ray diffraction
Argon atmospheres
As-deposited thin films
Atomic ratio
Impurity phasis
Radio frequency sputtering
Temperature intervals
Thermoelectric performance
Thermoelectric thin films
Thin films
https://hal-univ-rennes1.archives-ouvertes.fr/hal-01639690
Contributor : Laurent Jonchère <>
Submitted on : Monday, November 20, 2017 - 3:13:39 PM
Last modification on : Thursday, March 5, 2020 - 2:04:14 PM
Contributor : Laurent Jonchère <>
Submitted on : Monday, November 20, 2017 - 3:13:39 PM
Last modification on : Thursday, March 5, 2020 - 2:04:14 PM