Corrugated (2 × 2) silicon platelets horn antenna array at 560 GHz

C. Lee (1) , D. Gonzalez-Ovejero (2) , M. Alonso-Delpino (1) , T. Reck (1) , A. Peralta (1) , I. Mehdi (1) , G. Chattopadhyay (1)

1 JPL - Jet Propulsion Laboratory
2 IETR - Institut d'Électronique et des Technologies du numéRique

We designed and microfabricated a (2×2) silicon platelet horn antenna at 560 GHz, which is the highest frequency ever among silicon corrugated horn antennas. This was enabled by a silicon compression pin alignment technique of which inaccuracy is less than ± 2 μm in layer-to-layer. The simulation results show that the return loss and gain across the operation frequency of 490-600 GHz are approximately 25 dB and 22 dBi, respectively. The cross-polarization level is below -40 dB. The feature of batch processing will enable us simultaneously to build hundreds or thousands of horn antennas. © 2017 IEEE.

Keywords: Antenna arrays; Antennas; Batch data processing; Platelets; Silicon; Terahertz waves; Alignment technique; Corrugated horn antennas; Cross-polarization level; Microfabricated; Operation frequency; Return loss; Horn antennas

Domains: Computer Science [cs]; Networking and Internet Architecture [cs.NI]; Engineering Sciences [physics]; Electronics

C. Lee, D. Gonzalez-Ovejero, M. Alonso-Delpino, T. Reck, A. Peralta, et al.. Corrugated (2 × 2) silicon platelets horn antenna array at 560 GHz. 42nd International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2017, Aug 2017, Paris, France. ⟨10.1109/IRMMW-THz.2017.8066916⟩. ⟨hal-01671557⟩