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Corrugated (2 × 2) silicon platelets horn antenna array at 560 GHz

Abstract : We designed and microfabricated a (2×2) silicon platelet horn antenna at 560 GHz, which is the highest frequency ever among silicon corrugated horn antennas. This was enabled by a silicon compression pin alignment technique of which inaccuracy is less than ± 2 μm in layer-to-layer. The simulation results show that the return loss and gain across the operation frequency of 490-600 GHz are approximately 25 dB and 22 dBi, respectively. The cross-polarization level is below -40 dB. The feature of batch processing will enable us simultaneously to build hundreds or thousands of horn antennas. © 2017 IEEE.
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Contributor : Laurent Jonchère <>
Submitted on : Friday, December 22, 2017 - 1:48:33 PM
Last modification on : Thursday, January 7, 2021 - 4:33:04 PM



C. Lee, D. Gonzalez-Ovejero, M. Alonso-Delpino, T. Reck, A. Peralta, et al.. Corrugated (2 × 2) silicon platelets horn antenna array at 560 GHz. 42nd International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2017, Aug 2017, Paris, France. ⟨10.1109/IRMMW-THz.2017.8066916⟩. ⟨hal-01671557⟩



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