Corrugated (2 × 2) silicon platelets horn antenna array at 560 GHz

C. Lee 1 D. Gonzalez-Ovejero 2 M. Alonso-Delpino 1 T. Reck 1 A. Peralta 1 I. Mehdi 1 G. Chattopadhyay 1
1 JPL - Jet Propulsion Laboratory
2 IETR - Institut d'Electronique et de Télécommunications de Rennes
Abstract : We designed and microfabricated a (2×2) silicon platelet horn antenna at 560 GHz, which is the highest frequency ever among silicon corrugated horn antennas. This was enabled by a silicon compression pin alignment technique of which inaccuracy is less than ± 2 μm in layer-to-layer. The simulation results show that the return loss and gain across the operation frequency of 490-600 GHz are approximately 25 dB and 22 dBi, respectively. The cross-polarization level is below -40 dB. The feature of batch processing will enable us simultaneously to build hundreds or thousands of horn antennas. © 2017 IEEE.
Keywords : Antenna arrays Antennas Batch data processing Platelets Silicon Terahertz waves Alignment technique Corrugated horn antennas Cross-polarization level Microfabricated Operation frequency Return loss Horn antennas
Type de document :
Communication dans un congrès
42nd International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2017, Aug 2017, Paris, France. 〈10.1109/IRMMW-THz.2017.8066916〉
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https://hal-univ-rennes1.archives-ouvertes.fr/hal-01671557
Contributeur : Laurent Jonchère <>
Soumis le : vendredi 22 décembre 2017 - 13:48:33
Dernière modification le : vendredi 16 novembre 2018 - 01:30:43

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C. Lee, D. Gonzalez-Ovejero, M. Alonso-Delpino, T. Reck, A. Peralta, et al.. Corrugated (2 × 2) silicon platelets horn antenna array at 560 GHz. 42nd International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2017, Aug 2017, Paris, France. 〈10.1109/IRMMW-THz.2017.8066916〉. 〈hal-01671557〉

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