Investigation of laser-irradiated structure evolution and surface modification by in situ Micro-Raman spectroscopy

C. Li (1) , Gang Wang (1) , Xianghua Zhang (2) , Y. Zhang (1)

1 University of Nottingham Ningbo [China]
2 ISCR - Institut des Sciences Chimiques de Rennes

The structure evolution and surface modification of the ZnSb, ZnSb-Bi and ZnSb-NiO phase-change films are detected by in situ Raman laser irradiation with the different laser power and irradiation time. The results show that undoped ZnSb films exhibit a phase transformation from amorphous to metastable phases at 250 mW. The Bi-doped ZnSb films exhibit two different crystallization behaviors as the laser power increases. The films containing low Bi-doping concentration exhibit an amorphous-to-metastable phase transition, while the films containing high Bi-doping concentration directly crystallize into a mixture of new Bi-related crystalline phases and metastable ZnSb phases. As for ZnO-doped ZnSb films, the structure evolution encounters an amorphous phase, metastable ZnSb phase or mixture of both. Identifying the structure evolution in the metastable phase by in-situ Raman measurement method is of great significance for phase change memory application.

Keywords: Laser irradiation; Metastable phases; Raman spectra; Thin films

Domains: Chemical Sciences; Chemical Sciences; Material chemistry

C. Li, Gang Wang, Xianghua Zhang, Y. Zhang. Investigation of laser-irradiated structure evolution and surface modification by in situ Micro-Raman spectroscopy. Vacuum, 2018, 155, pp.376-379. ⟨10.1016/j.vacuum.2018.06.042⟩. ⟨hal-01835020⟩