Mechanical microsensors for pulse measurement

F. Garcia-Castro (1) , O. de Sagazan (1) , C. Simon (1) , N. Coulon (1) , F. Le Bihan (1)

1 IETR - Institut d'Électronique et des Technologies du numéRique

This paper presents a low cost flexible sensor that has been characterized by a homemade circuit. The technological process of the sensor was carried out at low temperature (180 °C) allowing to fabricate them on many types of substrates including flexible. As piezoresistive materials, N-type doped microcrystalline silicon deposited by PECVD was used. In order to obtain a good sensitivity to deformation, different designs were studied. Sensors are able to response to variable frequencies and different excitation waves such as a simple delta pulse or complex signals like the ECG wave. Several geometries are compared with the aim of obtaining the most sensitive design. This shows the feasibility and development of a highly sensitive system for small deformation measurements. ©The Electrochemical Society.

Keywords: Deformation; Flexible electronics; Microcrystalline silicon; Temperature; Doped microcrystalline silicons; Low temperatures; Piezoresistive materials; Pulse measurements; Sensitive systems; Small deformations; Technological process; Variable frequencies; Wearable sensors

Domains: Engineering Sciences [physics]

F. Garcia-Castro, O. de Sagazan, C. Simon, N. Coulon, F. Le Bihan. Mechanical microsensors for pulse measurement. Symposium on Wearable Sensors and Systems 1 -and- Microfabricated and Nanofabricated Systems for MEMS/NEMS 14 - AiMES 2018, ECS and SMEQ Joint International Meeting, Sep 2018, Cancun, Mexico. pp.71-78, ⟨10.1149/08616.007leest⟩. ⟨hal-02042748⟩