Steps toward integration of zeolite-based thermal mass gas detectors to form electronic nose

Abstract : In this paper, we show the integration steps we have undertaken for the integration of a recently proposed new principle for gas detection. Benefits of integration and co-integration of the miniaturized detectors with CMOS electronics will be the realization of arrays of selective detectors resulting in a new kind of electronic nose. © 2019 IEEE.
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Submitted on : Monday, September 9, 2019 - 1:56:15 PM
Last modification on : Tuesday, September 10, 2019 - 1:22:46 AM

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M. Harnois, O. de Sagazan, S. Inoue, E. Lebrasseur, K. Yamada, et al.. Steps toward integration of zeolite-based thermal mass gas detectors to form electronic nose. 2019 Symposium on Design, Test, Integration and Packaging of MEMS and MOEMS, DTIP 2019, May 2019, Paris, France. pp.8752802, ⟨10.1109/DTIP.2019.8752802⟩. ⟨hal-02281678⟩

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