First developments of sub-micronic waveguide structures on UV210 polymer

Daphné Duval (1) , Hervé Lhermite (2) , Christian Godet (1) , Nolwenn Huby (1) , Bruno Bêche (1)

1 IPR - Institut de Physique de Rennes
2 IETR - Institut d'Électronique et des Technologies du numéRique

First developments of sub-micronic waveguide structures on UV210 polymer are presented. The UV210 refractive index increases with exposure to DUV light (Dn=2.10-2). Propagation losses are performed by a cut-back method in single-mode UV210 waveguides: values as low as 3.4 and 6.2 dB/cm are obtained for, respectively, TE00 and TM00 polarizations.

Domaines: Micro et nanotechnologies/Microélectronique; Optique [physics.optics]

Daphné Duval, Hervé Lhermite, Christian Godet, Nolwenn Huby, Bruno Bêche. First developments of sub-micronic waveguide structures on UV210 polymer. ECIO 2010 15th European Conference on Integrated Optics, Apr 2010, Cambridge, United Kingdom. ⟨hal-00474174⟩