Suspended Polysilicon Gate TFTs as Generic Device for the Detection of Chemical and Biological Species

Tayeb Mohammed-Brahim (1) , France Le Bihan (1) , Anne-Claire Salaün (1) , Samuel Crand (1) , Olivier de Sagazan (1) , H. Mahfoz-Kotb , F. Bendriaa (2) , Maxime Harnois (2) , Aurélie Girard (3)

1 IETR - Institut d'Électronique et des Technologies du numéRique
2 IETR - Institut d'Electronique et de Télécommunications de Rennes
3 SBT - Service des Basses Températures

Tayeb Mohammed-Brahim, France Le Bihan, Anne-Claire Salaün, Samuel Crand, Olivier de Sagazan, et al.. Suspended Polysilicon Gate TFTs as Generic Device for the Detection of Chemical and Biological Species. International Thin Film Transistor Conference (ITC'10), Jan 2010, Himeji, Japan. ⟨hal-00506937⟩