Study of the Post-nitridation of Strontium and Tantalum Based Oxide and Oxynitride Thin Films - Archive ouverte HAL Access content directly
Conference Poster Year :

Study of the Post-nitridation of Strontium and Tantalum Based Oxide and Oxynitride Thin Films

(1) , (1) , (1) , (2) , (1) , (2) , , (1)
1
2

Domains

Engineering Sciences [physics]

Ratiba Benzerga  : Connect in order to contact the contributor

https://hal-univ-rennes1.archives-ouvertes.fr/hal-01588050

Submitted on : Friday, September 15, 2017-8:33:23 AM

Last modification on : Wednesday, April 27, 2022-3:56:38 AM

Not file

Dates and versions

hal-01588050 , version 1 (15-09-2017)

Identifiers

  • HAL Id : hal-01588050 , version 1

Cite

Florent Marlec, Laurent Le Gendre, Claire Le Paven, François Cheviré, Ratiba Benzerga, et al.. Study of the Post-nitridation of Strontium and Tantalum Based Oxide and Oxynitride Thin Films. 9th International Symposium on Nitrides and Related Materials (ISNT2017), Aug 2017, Sapporo, Japan. ⟨hal-01588050⟩

Export

BibTeX TEI Dublin Core DC Terms EndNote Datacite

Collections

UNIV-NANTES UNIV-RENNES1 CNRS INSA-RENNES IETR ISCR SCR_VC IETR_MF CENTRALESUPELEC INC-CNRS UR1-UFR-SPM UR1-MATH-STIC UR1-UFR-ISTIC IETR-CUTE IETR-FUNMAT IVER UNIV-RENNES INSA-GROUPE UR1-MATH-NUM UR1-MMS NANTES-UNIVERSITE
66 View
0 Download

Share

Gmail Facebook Twitter LinkedIn More