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Poster communications

Study of the Post-nitridation of Strontium and Tantalum Based Oxide and Oxynitride Thin Films

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Poster communications
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https://hal-univ-rennes1.archives-ouvertes.fr/hal-01588050
Contributor : Ratiba Benzerga <>
Submitted on : Friday, September 15, 2017 - 8:33:23 AM
Last modification on : Monday, October 5, 2020 - 9:50:25 AM

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  • HAL Id : hal-01588050, version 1

Citation

Florent Marlec, Laurent Le Gendre, Claire Le Paven, François Cheviré, Ratiba Benzerga, et al.. Study of the Post-nitridation of Strontium and Tantalum Based Oxide and Oxynitride Thin Films. 9th International Symposium on Nitrides and Related Materials (ISNT2017), Aug 2017, Sapporo, Japan. ⟨hal-01588050⟩

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