Role of nitrogen doping at the surface of titanium nitride thin films towards capacitive charge storage enhancement

A. Achour 1 M. Chaker 1 H. Achour A. Arman M. Islam 2 M. Mardani M. Boujtita 3 L. Le Brizoual 4 M. A. Djouadi 5 T. Brousse 5
1 EMT-INRS - Énergie Matériaux Télécommunications - INRS
2 KSU - King Saud University [Riyadh]
3 CEISAM - Chimie Et Interdisciplinarité : Synthèse, Analyse, Modélisation
4 IETR - Institut d'Electronique et de Télécommunications de Rennes
5 IMN - Institut des Matériaux Jean Rouxel
Abstract : We recently reported an impressive cycling stability (over 20,000 cycles) of titanium nitride (TiN) electrodes with high specific capacitance. It is anticipated that nitrogen (beta-N) doping in the oxidized surface of TiN film plays a crucial role in charge storage mechanism and stability of this material. In this work, we offer an evidence on the effect of beta-N doping on improvement in specific capacitance of vacuum annealed TiN thin films. The annealing of the TiN films leads to the diffusion of the excess beta-N from sub-surface to oxidized TiN film surface without further oxidation of the electrode surface. We demonstrate an increase in the TiN areal capacitance upon an increase in the amount of beta-N dopant. The areal capacitance of the annealed films was enhanced by 3-fold (8.2 mF cm(-2) in K2SO4 aqueous electrolyte) without sacrificing the cycling stability of the electrodes after more than 10,000 consecutive charge/discharge cycles. (C) 2017 Elsevier B.V. All rights reserved.
Keywords : Titanium nitride Oxidized surface Thermal annealing Electrochemical capacitors Nitrogen doping
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Journal articles
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https://hal-univ-rennes1.archives-ouvertes.fr/hal-01622061
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Submitted on : Tuesday, October 24, 2017 - 9:21:10 AM
Last modification on : Monday, March 25, 2019 - 4:04:02 PM

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A. Achour, M. Chaker, H. Achour, A. Arman, M. Islam, et al.. Role of nitrogen doping at the surface of titanium nitride thin films towards capacitive charge storage enhancement. Journal of Power Sources, Elsevier, 2017, 359, pp.349-354. ⟨10.1016/j.jpowsour.2017.05.074⟩. ⟨hal-01622061⟩

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