Volume detection based on porous silicon waveguide for CO2 mid-infrared spectroscopy

Sofiane Meziani (1) , Abdallah Jaafar (1) , Abdelali Hammouti (1) , Loïc Bodiou (1) , Nathalie Lorrain (1) , Parastesh Pirasteh (1) , Rémi Courson (2) , Jonathan Lemaitre (1) , Virginie Nazabal (3) , Mohammed Guendouz (1) , Joël Charrier (1)

1 FOTON - Institut des Fonctions Optiques pour les Technologies de l'informatiON
2 LAAS-TEAM - Service Techniques et Équipements Appliqués à la Microélectronique
3 ISCR - Institut des Sciences Chimiques de Rennes

A mid-infrared (mid-IR) porous silicon (PSi) waveguide gas sensor was fabricated. PSi guiding and confinement layers were prepared by electrochemical anodization. Ridge waveguides were patterned using standard i-line photolithography and reactive ion etching. Due to the open pores, light and gas molecules interact in the inside volume, unlike bulk material in which the interaction takes place with the evanescent part of the light. Propagation losses are measured for a wavelength range spanning from λ = 3.9 to 4.55 µm with a value of 11.4 dB/cm at λ = 4.28 µm. The influence of native oxidation and ageing on the propagation losses was investigated. Limit of detection (LoD) of 1000 ppm is obtained with the waveguide sensor at the carbon dioxide (CO 2 ) absorption peak at λ = 4.28 µm.

Domaines: Physique [physics]; Sciences de l'ingénieur [physics]

Sofiane Meziani, Abdallah Jaafar, Abdelali Hammouti, Loïc Bodiou, Nathalie Lorrain, et al.. Volume detection based on porous silicon waveguide for CO2 mid-infrared spectroscopy. Optics Express, 2024, 32 (8), pp.13628. ⟨10.1364/OE.516923⟩. ⟨hal-04541374⟩